The École Polytechnique Fédérale de Lausanne (EPFL) has prepared a MOOC class on micro and nano fabrication for MEMS that will open soon in a self-paced mode.
https://www.edx.org/course/micro-nanofabrication-mems-epflx-memsx-0
A teaser video is posted here: https://www.youtube.com/watch?time_continue=6&v=5fqRX9WMr0s
The course contains video lectures on the theory of processes, shows video sequences taken in the EPFL cleanroom, includes practice and grading quizzes and has a forum for exchanges.